Maskless implants of 20 keV Ga+ in thin crystalline silicon on insulator

A. M. Mio, G. D'Arrigo, R. G. Milazzo, E. Rimini, C. Spinella, L. Peto, A. Nadzeyka, S. Bauerdick
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4789625
The author haven't yet claimed this publicationThe author haven't yet claimed this publication