Combined effects of gas pressure and exciting frequency on electron energy distribution functions in hydrogen capacitively coupled plasmas

E. Abdel-Fattah, H. Sugai
  • Physics of Plasmas, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4789611
The author haven't finished explaining this publicationThe author haven't finished explaining this publication

The following have contributed to this page: Essam Abdel-Fattah