Interfacial study and energy-band alignment of annealed Al2O3 films prepared by atomic layer deposition on 4H-SiC

Feng Zhang, Guosheng Sun, Liu Zheng, Shengbei Liu, Bin Liu, Lin Dong, Lei Wang, Wanshun Zhao, Xingfang Liu, Guoguo Yan, Lixin Tian, Yiping Zeng
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4789380