Detection of defect states in low-k dielectrics using reflection electron energy loss spectroscopy

S.W. King, B. French, E. Mays
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4788980
The author haven't finished explaining this publicationThe author haven't finished explaining this publication

The following have contributed to this page: Sean King

Authors