Novel metal gates for high κ applications

Mei Chang, Michael S. Chen, Anaïs David, Srinivas Gandikota, Seshadri Ganguli, Brian E. Hayden, Steven Hung, Xinliang Lu, Claire Mormiche, Atif Noori, Duncan C. A. Smith, Chris J. B. Vian
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4780447
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