Ge nanoparticle formation by thermal treatment of rf-sputtered ZrO2/ZrGe2O3 superlattices

S. Haas, F. Schneider, C. Himcinschi, V. Klemm, G. Schreiber, J. von Borany, J. Heitmann
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4780033
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