Impact of hydrogen radical-injection plasma on fabrication of microcrystalline silicon thin film for solar cells

Yusuke Abe, Sho Kawashima, Atsushi Fukushima, Ya Lu, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Masaru Hori
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4778608
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The following have contributed to this page: Dr Kenji Ishikawa