Studies of the oxidation states of phosphorus gettered silicon substrates using X-ray photoelectron spectroscopy and transmission electron microscopy

Annett Tho̸gersen, Marie Syre, Birger Retterstol Olaisen, Spyros Diplas
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4775818