Strange hardness characteristic of hydrogenated diamond-like carbon thin film by plasma enhanced chemical vapor deposition process

  • Neeraj Dwivedi, Sushil Kumar, Hitendra K. Malik
  • Applied Physics Letters, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4775372

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http://dx.doi.org/10.1063/1.4775372

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