Energy distribution of electron flux at electrodes in a low pressure capacitively coupled plasma

Shahid Rauf, Leonid Dorf, Jason Kenney, Ken Collins
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4774306
The author haven't finished explaining this publicationThe author haven't finished explaining this publication
The following have contributed to this page: Leonid Dorf