Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

Boris Vratzov, Bert Bastiaens, Klaus Boller, Fred Bijkerk, Robert van der Meer, Igor Kozhevnikov, Balachander Krishnan, Jurriaan Huskens, Petra Hegeman, Christian Brons
  • AIP Advances, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4774297