Microscopic four-point-probe resistivity measurements of shallow, high density doping layers in silicon

  • Craig M. Polley, Warrick R. Clarke, Jill A. Miwa, Michelle Y. Simmons, Justin W. Wells
  • Applied Physics Letters, December 2012, American Institute of Physics
  • DOI: 10.1063/1.4773485

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http://dx.doi.org/10.1063/1.4773485

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