Investigation of an anomalous hump in gate current after negative-bias temperature-instability in HfO2/metal gate p-channel metal-oxide-semiconductor field-effect transistors

Szu-Han Ho, Ting-Chang Chang, Chi-Wei Wu, Wen-Hung Lo, Ching-En Chen, Jyun-Yu Tsai, Guan-Ru Liu, Hua-Mao Chen, Ying-Shin Lu, Bin-Wei Wang, Tseung-Yuen Tseng, Osbert Cheng, Cheng-Tung Huang, Simon M. Sze
  • Applied Physics Letters, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4773479