Thermal annealing effect on material characterizations of β-Ga2O3 epilayer grown by metal organic chemical vapor deposition

Chiung-Yi Huang, Ray-Hua Horng, Dong-Sing Wuu, Li-Wei Tu, Hsiang-Shun Kao
  • Applied Physics Letters, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4773247