Germanium metal-semiconductor-metal photodetectors evanescently coupled with upper-level silicon oxynitride dielectric waveguides

Juan C. Cervantes-González, Donghwan Ahn, Xiaoguang Zheng, Sanjay K. Banerjee, Alfonso T. Jacome, Joe C. Campbell, Ignacio E. Zaldivar-Huerta
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4773212