Dopant mapping in highly p-doped silicon by micro-Raman spectroscopy at various injection levels

T. Kunz, M. T. Hessmann, S. Seren, B. Meidel, B. Terheiden, C. J. Brabec
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4773110