Measuring the energy flux at the substrate position during magnetron sputter deposition processes

P.-A. Cormier, A. Balhamri, A.-L. Thomann, R. Dussart, N. Semmar, J. Mathias, R. Snyders, S. Konstantinidis
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4773103