Crystallization to polycrystalline silicon thin film and simultaneous inactivation of electrical defects by underwater laser annealing

Emi Machida, Masahiro Horita, Yasuaki Ishikawa, Yukiharu Uraoka, Hiroshi Ikenoue
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4772513