Crystallization to polycrystalline silicon thin film and simultaneous inactivation of electrical defects by underwater laser annealing

  • Emi Machida, Masahiro Horita, Yasuaki Ishikawa, Yukiharu Uraoka, Hiroshi Ikenoue
  • Applied Physics Letters, December 2012, American Institute of Physics
  • DOI: 10.1063/1.4772513

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http://dx.doi.org/10.1063/1.4772513

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