Three-dimensional micro electromechanical system piezoelectric ultrasound transducer

Arman Hajati, Dimitre Latev, Deane Gardner, Azadeh Hajati, Darren Imai, Marc Torrey, Martin Schoeppler
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4772469
The author haven't yet claimed this publicationThe author haven't yet claimed this publication