Activation and thermal stability of ultra-shallow B+-implants in Ge

B. R. Yates, B. L. Darby, D. H. Petersen, O. Hansen, R. Lin, P. F. Nielsen, L. Romano, B. L. Doyle, A. Kontos, K. S. Jones
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4770474
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