Ultrananocrystalline diamond nano-pillars synthesized by microwave plasma bias-enhanced nucleation and bias-enhanced growth in hydrogen-diluted methane

Yueh-Chieh Chu, Chia-Hao Tu, Chuan-pu Liu, Yonhua Tzeng, Orlando Auciello
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4769861
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