Impurity distribution and microstructure of Ga-doped ZnO films grown by molecular beam epitaxy

A. V. Kvit, A. B. Yankovich, V. Avrutin, H. Liu, N. Izyumskaya, Ü. Özgür, H. Morkoç, P. M. Voyles
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4769801