Unusual growth of polycrystalline oxide film induced by negative ion bombardment in the capacitively coupled plasma deposition

  • S. Takayanagi, T. Yanagitani, M. Matsukawa
  • Applied Physics Letters, December 2012, American Institute of Physics
  • DOI: 10.1063/1.4769224

The authors haven't yet claimed this publication.

Read Publication


In partnership with:

Link to American Institute of Physics showcase