Unusual growth of polycrystalline oxide film induced by negative ion bombardment in the capacitively coupled plasma deposition

  • S. Takayanagi, T. Yanagitani, M. Matsukawa
  • Applied Physics Letters, December 2012, American Institute of Physics
  • DOI: 10.1063/1.4769224

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http://dx.doi.org/10.1063/1.4769224

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