Selective nucleation induced by defect nanostructures: A way to control cobalt disilicide precipitation during ion implantation

F. Fortuna, M.-A. Nguyen, M.-O. Ruault, M. A. Kirk, V. A. Borodin, M. G. Ganchenkova
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4769213
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