Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AlN thin films

  • M. Schneider, A. Bittner, F. Patocka, M. Stöger-Pollach, E. Halwax, U. Schmid
  • Applied Physics Letters, November 2012, American Institute of Physics
  • DOI: 10.1063/1.4768951

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