Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AlN thin films

M. Schneider, A. Bittner, F. Patocka, M. Stöger-Pollach, E. Halwax, U. Schmid
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4768951