Fabrication of large-grained thin polycrystalline silicon films on foreign substrates by titanium-assisted metal-induced layer exchange

T. Antesberger, T. A. Wassner, M. Kashani, M. Scholz, R. Lechner, S. Matich, M. Stutzmann
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4768542