Electrical and optical properties of Ta-Si-N thin films deposited by reactive magnetron sputtering

G. Ramírez, R. Sanjinés, D. Oezer, S. E. Rodil
  • Journal of Applied Physics, December 2012, American Institute of Physics
  • DOI: 10.1063/1.4766904
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The following have contributed to this page: Dr Sandra E Rodil