Critical tensile strain and water vapor transmission rate for nanolaminate films grown using Al2O3 atomic layer deposition and alucone molecular layer deposition

Shih-Hui Jen, Byoung H. Lee, Steven M. George, Robert S. McLean, Peter F. Carcia
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4766731