Electron energy distribution functions measured by Langmuir probe with optical emission spectroscopy in very high frequency capacitive discharge in nitrogen

E. Abdel-Fattah, M. Bazavan, H. Sugai
  • Physics of Plasmas, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4766475
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The following have contributed to this page: Essam Abdel-Fattah