Investigation of plasma-doped fin structure and characterization of dopants by atom probe tomography

  • B. H. Kim, S. M. Park, S. W. Park, Y. B. Park, H. J. Kim, C. G. Park
  • Applied Physics Letters, November 2012, American Institute of Physics
  • DOI: 10.1063/1.4766440

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http://dx.doi.org/10.1063/1.4766440

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