Lithographically defined low dimensional SiGe nanostripes as silicon stressors

M. Bollani, D. Chrastina, M. Fiocco, V. Mondiali, J. Frigerio, L. Gagliano, E. Bonera
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4765009