Optical and structural properties of SiOx films grown by molecular beam deposition: Effect of the Si concentration and annealing temperature

Markku Räsänen, Sergei Novikov, Leonid Khriachtchev, Timur Nikitin, Rama Velagapudi, Jani Sainio, Jouko Lahtinen
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4764893
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