Ultra-thin atomic-layer deposited alumina incorporating silica sol makes ultra-durable antireflection coatings

Jia Li, Pinjun Lan, Hua Xu, Xianpeng Zhang, Ye Yang, Ruiqin Tan, Olli Jylhä, Yuehui Lu
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4764332