Plasma diagnostics of low pressure high power impulse magnetron sputtering assisted by electron cyclotron wave resonance plasma

Vitezslav Stranak, Ann-Pierra Herrendorf, Steffen Drache, Martin Cada, Zdenek Hubicka, Robert Bogdanowicz, Milan Tichy, Rainer Hippler
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4764102
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The following have contributed to this page: Professor Rainer Hippler