High-speed plasmonic nanolithography with a solid immersion lens-based plasmonic optical head

Geon Lim, Guk-Jong Choi, Myeong-Gu Gang, Sung-Mook Kang, Kyoung-Su Park, Byung-Kwon Min, Young-Pil Park, No-Cheol Park, Taeseob Kim, Won-Sup Lee, Hang-Eun Joe
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4760263