Thermal conduction properties of Mo/Si multilayers for extreme ultraviolet optics

Elah Bozorg-Grayeli, Zijian Li, Mehdi Asheghi, Gil Delgado, Alexander Pokrovsky, Matthew Panzer, Daniel Wack, Kenneth E. Goodson
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4759450