Properties of low indium content Al incorporated IZO (indium zinc oxide) deposited at room temperature

Jian Sun, Weifeng Yang, Yanhua Huang, Weng Soon Lai, Alex Y. S. Lee, Chiou Fu Wang, Hao Gong
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4758383