Impact of oxygen bonding on the atomic structure and photoluminescence properties of Si-rich silicon nitride thin films

P. D. Nguyen, D. M. Kepaptsoglou, Q. M. Ramasse, M. F. Sunding, L. O. Vestland, T. G. Finstad, A. Olsen
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4756998