Stress-induced leakage current and trap generation in HfO2 thin films

C. Mannequin, P. Gonon, C. Vallée, L. Latu-Romain, A. Bsiesy, H. Grampeix, A. Salaün, V. Jousseaume
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4756993