Photonic crystal fabrication in lithium niobate via pattern transfer through wet and dry etched chromium mask

Ozgur Yavuzcetin, Herman P. Novikov, Rebecca L. Dally, Sean T. Malley, Nicholas R. Perry, Birol Ozturk, Srinivas Sridhar
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4756958