Approaching intrinsic performance in ultra-thin silicon nitride drum resonators

V. P. Adiga, B. Ilic, R. A. Barton, I. Wilson-Rae, H. G. Craighead, J. M. Parpia
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4754576
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