Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics

  • K. Vanstreels, C. Wu, P. Verdonck, M. R. Baklanov
  • Applied Physics Letters, September 2012, American Institute of Physics
  • DOI: 10.1063/1.4753972

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http://dx.doi.org/10.1063/1.4753972

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