Mass transport and thermal stability of TiN/Al2O3/InGaAs nanofilms

O. Ceballos-Sanchez, A. Sanchez-Martinez, M. O. Vazquez-Lepe, T. Duong, R. Arroyave, F. Espinosa-Magaña, A. Herrera-Gomez
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4751435