The effects of vacuum ultraviolet radiation on low-k dielectric films

H. Sinha, H. Ren, M. T. Nichols, J. L. Lauer, M. Tomoyasu, N. M. Russell, G. Jiang, G. A. Antonelli, N. C. Fuller, S. U. Engelmann, Q. Lin, V. Ryan, Y. Nishi, J. L. Shohet
  • Journal of Applied Physics, December 2012, American Institute of Physics
  • DOI: 10.1063/1.4751317