Thermally induced interface chemistry in Mo/B4C/Si/B4C multilayered films

S. L. Nyabero, R. W. E. van de Kruijs, A. E. Yakshin, E. Zoethout, F. Bijkerk
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4751029