Dehydroxyl effect of Sn-doped silicon oxide resistance random access memory with supercritical CO2 fluid treatment

Tsung-Ming Tsai, Kuan-Chang Chang, Ting-Chang Chang, Yong-En Syu, Kuo-Hsiao Liao, Bae-Heng Tseng, Simon M. Sze
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4750235