Self consistent radio-frequency wave propagation and peripheral direct current plasma biasing: Simplified three dimensional non-linear treatment in the “wide sheath” asymptotic regime

L. Colas, J. Jacquot, S. Heuraux, E. Faudot, K. Crombé, V. Kyrytsya, J. Hillairet, M. Goniche
  • Physics of Plasmas, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4750046
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