Generation of high-resolution kagome lattice structures using extreme ultraviolet interference lithography

  • Li Wang, Bernd Terhalle, Vitaliy A. Guzenko, Alan Farhan, Mohamad Hojeij, Yasin Ekinci
  • Applied Physics Letters, August 2012, American Institute of Physics
  • DOI: 10.1063/1.4748758

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http://dx.doi.org/10.1063/1.4748758

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