Compliant Si nanostructures on SOI for Ge nanoheteroepitaxy—A case study for lattice mismatched semiconductor integration on Si(001)

P. Zaumseil, G. Kozlowski, Y. Yamamoto, J. Bauer, M. A. Schubert, T. U. Schülli, B. Tillack, T. Schroeder
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4748341
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