The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas

E. Schüngel, D. Eremin, J. Schulze, T. Mussenbrock, U. Czarnetzki
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4747914
The author haven't yet claimed this publicationThe author haven't yet claimed this publication